Search
Feedback
About
Help
News
Narrow your search
| Listing 1 - 1 of 1 |
Sort by
|
Dissertation
Characterisation of the etching of Ge sacrificial layers for surface micromachining of MEMS
Loading...
Authors:
Hellin Rico, Raquel
---
KUL. Faculteit toegepaste wetenschappen. Departement metaalkunde en toegepaste materiaalkunde - MTM
Year: 2003
Year: 2003
Abstract | Keywords | Export | Availability | Bookmark
Loading...
Export citation
Choose an application
- Reference Manager
- EndNote
- RefWorks (Direct export to RefWorks)
Bookmark
Abstract
| Listing 1 - 1 of 1 |
Sort by
|